IDENTIFICATION OF THE INFLUENCE OF THE DIFFERENT AIR BEARINGS COMPRISED IN AN AXIS OF ROTATION SYSTEM ON THE RADIAL ERROR MOTION

机译：识别旋转系统轴中不同的空气轴承对径向误差运动的影响

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Current trends in high-precision applications stress the need for reliable and well-designed air-bearing systems. In this work, the influence and the interaction are studied of the different air bearings of an axis of rotation system on the radial error motion with the objective to increase the running accuracy to the sub-nanometer level (< 5 nm). To this end, a 5-DOF film model is developed that can account for the minutest details affecting the error motion and the dynamic film forces.

机译：高精度应用的当前趋势强调了对可靠且设计良好的空气轴承系统的需求。在这项工作中，研究了旋转轴的不同空气轴承对径向误差运动的影响和相互作用，目的是将运行精度提高到亚纳米水平（<5 nm）。为此，开发了一种5自由度的胶片模型，该模型可以说明影响误差运动和动态胶片力的最细微的细节。

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《Annual meeting of the American Society for Precision Engineering》|2012年|182-185|共4页
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Steven Cappa; Dominiek Reynaerts; Farid Al-Bender;
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1. A new method for characterizing axis of rotation radial error motion: Part 1. Two-dimensional radial error motion theory [J] . Xiaodong Lu, Arash Jamalian Precision Engineering . 2011,第1期

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2. Development of Active Squeeze Air Bearing Using Oscillation of Piezoelectric Actuators (2nd Report) -Radial Squeeze Air Bearing for Motion Error Correction- [J] . Hiromi Isobe, Chie Onodera, Yoshihisa Nakao 精密工学会誌 . 2001,第1期

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3. Development of Active Squeeze Air Bearing Using Oscillation of Piezoelectric Actuators (2nd Report) -Radial Squeeze Air Bearing for Motion Error Correction- [J] . Hiromi Isobe, Chie Onodera, Yoshihisa Nakao 精密工学会誌 . 2001,第1期

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4. IDENTIFICATION OF THE INFLUENCE OF THE DIFFERENT AIR BEARINGS COMPRISED IN AN AXIS OF ROTATION SYSTEM ON THE RADIAL ERROR MOTION [C] . Steven Cappa, Dominiek Reynaerts, Farid Al-Bender Annual Meeting of The American Society for Precision Engineering . 2012

机译：在径向误差运动上识别旋转系统轴上的不同空气轴承的影响
5. Experimental feasibility study of radial injection cooling of three-pad radial air foil bearings. [D] . Shrestha, Suman K. 2012

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6. A System-Level Self-Calibration Method for Installation Errors in A Dual-Axis Rotational Inertial Navigation System [O] . Shiyu Bai, Jizhou Lai, Pin Lyu, 2019

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7. Development of Active Squeeze Air Bearing Using Oscillation of Piezoelectric Actuators. (2nd Report). Radial Squeeze Air Bearing for Motion Error Correction. [O] . Hiromi ISOBE, Chie ONODERA, Yoshihisa NAKAO, 2001

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8. The Influence of Systematic Errors of Natural Motions and of the Secular Motion of the Pole on Results in Determining the Secular Variations of Longitude [R] . Dobretsova, K. V. 1969

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IDENTIFICATION OF THE INFLUENCE OF THE DIFFERENT AIR BEARINGS COMPRISED IN AN AXIS OF ROTATION SYSTEM ON THE RADIAL ERROR MOTION

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