The surface deformation was examined for the X-ray mirror fabricated by the epoxy replication method. The deformation errors of epoxy-based mirror were less than 5 nm and 25 nm within a line of 355 μm (a few hundreds of micrometer) and a diameter of 48.3 mm (a few tens of millimeter), respectively. In addition, defects were founded on the surface of the replica mirror. The height of the defects was ranged from 2 nm to 6 nm.
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