Simultaneous diagnostics of electron density and temperature in micoplasma reactor for scanning plasma etching

机译：用于扫描等离子体蚀刻的线粒体反应器中电子密度和温度的同时诊断

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Microplasma has been applied widely in micro fabrication. The diagnostics of microplasma generated in the scanning plasmas etching system is critical during the system operation. An experimental system is setup to investigate microplasma parameters of the dc-driven microplasmas reactor operating in CHF₃ reactive gases at different gas pressure. The electron density and temperature was calculated from the optical emission spectral (OES) of the microplasmas based on Stark broadening of the Balmer lines of the hydrogen, H_β and H_γ. The results of this paper may provide experimental verification for the optimized design of operative conditions of microplasmas reactor.

机译：微等离子体已被广泛应用于微加工中。在系统运行过程中，扫描等离子体蚀刻系统中产生的微等离子体的诊断至关重要。建立了一个实验系统，以研究在CHF _{3 反应气体中在不同气压下运行的直流驱动微等离子体反应器的微等离子体参数。根据氢，H _{β和H _{γ的Balmer谱线的Stark加宽，由微等离子体的发射光谱（OES）计算电子密度和温度。本文的结果可为微等离子体反应器运行条件的优化设计提供实验验证。}}}

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《IEEE International Conference on Nanotechnology》|2013年|648-651|共4页
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Hai Wang; Zhou Xuan; Li Han; Wen Li;
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1. Laser diagnostics for the electron density of helium low temperature plasmas using saturated absorption spectroscopy [J] . Lee Wonwook, Shim Sungyong, Oh Cha-Hwan Journal of Quantitative Spectroscopy & Radiative Transfer . 2019,第期

机译：使用饱和吸收光谱，激光诊断氦低温等离子体的电子密度
2. Electron density and temperature profile diagnostics for C-2 field reversed configuration plasmas [J] . Deng B. H., Kinley J. S., Schroeder J. Review of Scientific Instruments . 2012,第10期

机译：C-2场反转配置等离子体的电子密度和温度分布诊断
3. Identification of three weak lines and their influences on diagnostics of electron temperature and density in astrophysical plasmas [J] . Liang GY, Zhao G, Shi JR, Chinese physics letters . 2004,第10期

机译：鉴定三条弱线及其对天体等离子体中电子温度和密度诊断的影响
4. Simultaneous diagnostics of electron density and temperature in micoplasma reactor for scanning plasma etching [C] . Hai Wang, Zhou Xuan, Li Han, IEEE International Conference on Nanotechnology . 2013

机译：胶束膜蚀刻胶质盆反应器中电子密度和温度的同时诊断扫描等离子体蚀刻
5. Plasma spectroscopic diagnostic tool using collisional-radiative models and its application to different plasma discharges for electron temperature and neutral density determination. [D] . Sciamma, Ella Marion. 2007

机译：使用碰撞辐射模型的等离子体光谱诊断工具及其在不同等离子体放电中用于电子温度和中性密度测定的应用。
6. Growthof an Ultrathin Zirconia Film on Pt3Zr Examined by High-ResolutionX-ray Photoelectron SpectroscopyTemperature-Programmed Desorption Scanning Tunneling Microscopyand Density Functional Theory [O] . Hao Li, Joong-Il Jake Choi, Wernfried Mayr-Schmölzer, -1

机译：成长性高分辨率检查Pt3Zr上超薄氧化锆膜的制备X射线光电子能谱程序升温解吸扫描隧道显微镜和密度泛函理论
7. A new diagnostic technique to simultaneously measure the electron temperature, ionic charge state, and plasma density near the critical surface in laser-plasma interaction experiments. Final report [O] . K. Mizuno, J.S. DeGroot, W. Seka, 1990

机译：一种新的诊断技术，用于在激光等离子体相互作用实验中临界表面附近测量电子温度，离子电荷状态和等离子体密度。总结报告
8. New diagnostic technique to simultaneously measure the electron temperature, ionic charge state, and plasma density near the critical surface in laser-plasma interaction experiments. Final report [R] . Mizuno, K, DeGroot, J S, Seka, W, 1990

机译：在激光 - 等离子体相互作用实验中同时测量临界表面附近的电子温度，离子电荷状态和等离子体密度的新诊断技术。总结报告

Simultaneous diagnostics of electron density and temperature in micoplasma reactor for scanning plasma etching

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