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首页> 外文会议>IEEE International Conference on Nanotechnology >Development of Low-cost and Large-area Nanopatterned Vitreous Carbon Stamp for Glass Nanoreplication
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Development of Low-cost and Large-area Nanopatterned Vitreous Carbon Stamp for Glass Nanoreplication

机译：低成本和大型纳米透明理由碳印章的开发玻璃纳米术

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摘要

A low-cost and large-area nano-patterning method of vitreous carbon (VC) was proposed for the stamp of glass nanoreplication process. A polymer mold for a VC nano-pattern was replicated by UV imprinting from a silicon master pattern, and a furan precursor with a nano-grating structure with a pitch of 500.5nm and height of 232.4nm was replicated against a polymer mold. By the carbonization of the faran precursor, a VC nanostamp a nanograting cavity with a pitch of 384nm and a height of 151nm was fabricated. Finally, a glass nanograting was fabricated by glass thermal nanoreplication process using the VC mold. To examine the feasibility of the proposed method, the thermal stability of the optical filter composed of glass nanograting and TiO_2 layer was analyzed.
机译：提出了一种低成本和大区域纳米图案化方法的玻璃碳（VC），用于玻璃纳米型拼相过程。通过UV印记从硅主体图案中的UV印记复制一种用于VC纳米图案的聚合物模具，并且富含纳米光栅结构的纳米光栅结构，距高分子体模具被复制了500.5nm和232.4nm的高度。通过法兰前体的碳化，制造了VC纳米阵列，制造具有384nm的高度和高度为151nm的纳入腔。最后，通过使用VC模具通过玻璃热纳米型拼相工艺制造玻璃纳米玻璃。为了检查所提出的方法的可行性，分析了由玻璃纳米半化和TiO_2层组成的光学滤光器的热稳定性。

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