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Assembly and evaluation of MWCNTs probe thermal sensor by nanorobotic manipulation

机译：MWCNTS探针热传感器的组装和评价纳米毒液操纵

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This paper reports a thermal sensor assembled by two multi-walled carbon nanotubes (MWCNTs) inside a field emission scanning electron microscope (FESEM) which constructed a probe tip in order to detect the local environment of single cell. An atomic force microscope (AFM) cantilever was used for substrate which is composed by Si3N4, and double side was covered by gold layer. Two MWCNTs were assembled to both side of AFM cantilever individually by employing a nanorobotic manipulation. Then another AFM cantilever was used as an end effector to manipulate the MWCNTs to touch, and used electron beam induced deposition (EBID) to bonding the two MWCNTs. The MWCNTs probe thermal sensor was evaluation inside a thermostated container for 30 °C to 60 °C. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR). We hope this result will be used rapidly in future.
机译：本文报道了一种由两个多壁碳纳米管（MWCNT）组装的热传感器，该热传感器在场发射扫描电子显微镜（FESEM）内部构建探针尖端，以检测单个电池的局部环境。原子力显微镜（AFM）悬臂用于由Si3N4组成的基材，双面被金层覆盖。通过采用纳米毒液操纵单独组装两个MWCNT到AFM悬臂的两侧。然后将另一个AFM悬臂用作末端执行器以操纵MWCNT以触摸，并且使用电子束感应沉积（EBID）以键合两个MWCNT。 MWCNT探针热传感器在恒温容器内评价为30℃至60℃。实验结果表明，耐温系数（TCR）的阳性特征。我们希望将来会迅速使用此结果。

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