Laser-Assisted Nanofabrication in the Scanning Electron Microscope

机译：扫描电子显微镜中的激光辅助纳米制剂

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A prototype apparatus was developed to deliver up to ~300 kW/cm2 of cw or pulsed near IR light to a sample inside a scanning electron microscope (SEM) or focused ion beam (FIB) instrument. Transient heating of localized areas around the electron or ion beam can be performed with fine control of power and pulse parameters, down to sub-microsecond durations. In conjunction with a gas injection system, electron beam induced deposition (EBID) of enhanced purity Pt and Au structures was demonstrated. Dynamics of pulsed laser induced solid-state dewetting of Ni and Au were also observed in real time in a SEM/FIB, which may lead to improved understanding and manipulation of self-assembled nanostructures.

机译：开发了原型装置以将高达〜300kW / cm2的CW或靠近IR光脉冲传递到扫描电子显微镜（SEM）或聚焦离子束（FIB）仪器内的样品。可以通过对电力和脉冲参数的微量控制来执行电子或离子束周围的局部区域的瞬态加热，下降到亚微秒持续时间。结合气体喷射系统，对增强纯度Pt和Au结构的电子束感应沉积（Ebid）进行了说明。在SEM / FIB中也可以实时观察脉冲激光诱导的Ni和Au的固态脱模的动态，这可能导致改善自组装纳米结构的理解和操纵。

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来源
《IEEE International Conference on Nanotechnology》|2012年||共4页
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作者
Gregory A. Magel; Nicholas A. Roberts; Jason D. Fowlkes;
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中图分类 TB383-53;
关键词
Nanofabrication; Scanning Electron Microscopy; Self-assembly; Electron Beam; Focused Ion Beam;

机译：纳米制剂;扫描电子显微镜;自组装;电子束;聚焦离子束;
入库时间 2022-08-20 22:08:45

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专利

1. Three-dimensional nanofabrication by electron-beam-induced deposition using 200-keV electrons in scanning transmission electron microscope [J] . Z.Q. LIU, K. MITSUISHI, K. FURUYA Applied Physics. A, Materials Science & Processing . 2005,第7期

机译：扫描透射电子显微镜中使用200keV电子通过电子束诱导沉积进行的三维纳米加工
2. The scanning low-energy electron microscope: First attainment of diffraction contrast in the scanning electron microscope [J] . Scanning . 1999,第1期

机译：扫描低能电子显微镜：扫描电子显微镜中衍射对比度的首创
3. Environmental Scanning Electron Microscope environmental scanning electron microscope [J] . Kuwahara Y.author_name/ 材料科学 . 1997,第3期

机译：环境扫描电子显微镜环境扫描电子显微镜
4. Laser-assisted nanofabrication in the scanning electron microscope [C] . Magel Gregory A., Roberts Nicholas A., Fowlkes Jason D., 2012 12th IEEE International Conference on Nanotechnology. . 2012

机译：扫描电子显微镜中的激光辅助纳米加工
5. Nanofabrication with the scanning tunneling microscope. [D] . Ehrichs, Edward Erling. 1992

机译：使用扫描隧道显微镜进行纳米加工。
6. Comparing Scanning Electron Microscope and TransmissionElectron Microscope Grain Mapping Techniques Applied to Well-Definedand Highly Irregular Nanoparticles [O] . RupertoG. Mariano, Allison Yau, Joseph T. McKeown, 2020

机译：扫描电子显微镜和透射电镜的比较电子显微镜晶粒映射技术在精细定义中的应用和高度不规则的纳米粒子
7. Application of immunohistochemical staining to scanning electron microscopy - A new method of comparative studies of the same cells with light microscope and scanning electron microscope. [O] . Hidemitsu MIZUUCHI, Ryuichi KUDO, Hajime TAMURA, 1986

机译：免疫组织化学染色在扫描电子显微镜中的应用 - 一种用光学显微镜和扫描电子显微镜对同一细胞比较研究的新方法。
8. Nanofabrication of Electronic Devices with the Scanning Tunneling Microscope [R] . DeLozanne, A. 1994

机译：用扫描隧道显微镜纳米加工电子器件

Laser-Assisted Nanofabrication in the Scanning Electron Microscope

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