Demand for micro-co-ordinate measuring machines (micro-CMMs) within industry is increasing due to the need for accurate measurement of the geometry of small-scale objects. Optical micro-CMMs have the advantage over traditional stylus-based CMMs of being non-contact instruments, and have the potential to acquire large amounts of data, with high resolution, in a relatively short period of time. The focus variation (FV) technique is typically used for surface topography measurement, but has the potential to be implemented as a sensor technology for optical micro-CMMs. Exploring the possibility of the FV technique as part of an optical micro-CMM requires a robust performance verification of the instrument and measuring procedure, using material measures that are traceable to the definition of the metre. This paper proposes a design for a calibration artefact that is suited to volumetric verification for micro-CMMs based on the FV technique and recognizes recent developments of ISO 10360.
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