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首页> 外文会议>IEEE Pulsed Power Conference >Optical emission spectral analysis of microplasma discharges in atomic and molecular gases at pressures up to 1.65 MPa
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Optical emission spectral analysis of microplasma discharges in atomic and molecular gases at pressures up to 1.65 MPa

机译：压力高达1.65 MPa时原子和分子气体中的微等离子体放电的光发射光谱分析

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High Pressure microplasmas are potentially useful as high frequency microswitches due to their high electron densities and rapid switching characteristics. In the process of designing these high frequency microswitches, plasma temperatures are important in determining the lifetime of the microswitch materials. Pure gases and mixtures of He, Ar, H2, and N2 are tested for pressure ranges from 0.1 MPa to 1.65 MPa at electrode gap lengths ranging between 20 μm and 50 μm. Higher pressures allow for smaller discharge diameters with high current densities while still maintaining normal glow discharge characteristics. Optical emission spectra (OES) are collected as a non-intrusive diagnostic. Rotational and vibrational temperatures are measured for the different combinations using the 2nd positive system of N2. Rotational temperatures increase with pressure and range from 500K to 3000K for various mixtures at 10 atm. In molecular gases a transition to vibrational-rotational equilibrium is observed at higher pressures. Normal glow discharge operating regimes are maintained at high pressures in all the gases. However instabilities are more likely to occur at high pressure when the system capacitance is high.
机译：高压微等离子体由于其高的电子密度和快速的开关特性而潜在地可用作高频微开关。在设计这些高频微动开关的过程中，等离子体温度对于确定微动开关材料的寿命很重要。在20μm和50之间的电极间隙长度下，测试纯气体以及He，Ar，H 2 和N 2 的混合物的压力范围为0.1 MPa至1.65 MPa微米较高的压力允许较小的放电直径和较高的电流密度，同时仍保持正常的辉光放电特性。收集光发射光谱（OES）作为非侵入式诊断。使用N 2 的第二正系统测量不同组合的旋转和振动温度。旋转温度随压力而增加，在10个大气压下，各种混合物的旋转温度范围从500K到3000K。在分子气体中，在较高压力下会观察到向振动-旋转平衡的过渡。正常的辉光放电运行状态在所有气体中都维持在高压下。但是，当系统电容较高时，在高压下更可能发生不稳定性。

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