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Structural, chemical and luminescent investigation of MBE- and CSS-deposited CdTe thin-films for solar cells

机译:MBE和CSS沉积的CdTe薄膜用于太阳能电池的结构,化学和发光研究

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In this study we combine scanning electron microscopy (SEM)-based cathodoluminescence (CL) spectrum imaging and electron backscatter diffraction (EBSD) in order to map the spatial distribution of various atomic-level defects in CdTe films as a function of deposition and film processing. Two different deposition techniques were used. Lattice-matched, epitaxial CdTe films were deposited on a single crystal as well as on polycrystalline CdTe substrates by molecular beam epitaxy (MBE). For comparison purposes, polycrystalline CdTe films were deposited using our standard close-spaced sublimation (CSS) method on glass-based substrates.
机译:在这项研究中,我们结合了基于扫描电子显微镜(SEM)的阴极发光(CL)光谱成像和电子背散射衍射(EBSD),以便绘制CdTe薄膜中各种原子级缺陷的空间分布,作为沉积和薄膜加工的函数。使用了两种不同的沉积技术。晶格匹配的外延CdTe薄膜通过分子束外延(MBE)沉积在单晶以及多晶CdTe衬底上。为了进行比较,使用我们的标准近距离升华(CSS)方法在玻璃基基板上沉积了多晶CdTe膜。

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