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A sensitive optical probe for surface topography based on an optimized astigmatic method

机译：基于优化像散方法的表面形貌灵敏光学探头

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Surface topography is required to the function of many kinds of industrial products, and the number of applications keeps increasing, making the need for adequate control of surfaces and an understanding of surface topography measurements more important than ever. In this paper, we presented a sensitive and cost-effective optical probe for surface topography. The astigmatic method used in the optical probe is optimized for submicronanometer resolution and monotonic characterization of focus error signal (FES). A home-made system based on this optical probe was also presented, and the measurement results of surface topography indicate great potential of applications in many industrial fields.
机译：表面形貌是许多工业产品的功能所必需的，并且应用程序的数量也在不断增加，这使得对表面的充分控制和对表面形貌测量的理解的需求比以往任何时候都更加重要。在本文中，我们介绍了一种用于表面形貌的灵敏且经济高效的光学探头。光学探头中使用的像散方法针对亚微米/纳米分辨率和聚焦误差信号（FES）的单调表征进行了优化。还提出了一种基于该光学探针的自制系统，表面形貌的测量结果表明在许多工业领域中具有巨大的应用潜力。

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