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Utilization of the Scheimpflug-principle in scatterometer design

机译：利用散射仪设计中的Scheimpflug原理

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In previous papers the basic problem of imaging the scatter distribution of an aperture by means of catadioptricalscatterometrical devices has been shown to be reducible to the imaging of the caustic of the - preferably elliptical- mirror used as primary element. In an geometrical—optical approach this caustic is the object to be mappedonto a planar sensor by a secondary imaging optical device. Since the caustic is not a plane object, care hasto be taken for the field of depth of the secondary optics. While in symmetrical alignments the caustic's areaof interest is usually flat enough to be treated as a plane perpendicular to the optical axis, in so called off-axisdevices the violation of the conditions known as Scheimpflug- and Hinge-principles become remarkable. Similarproblems occur with the primary aperture image in dioptrical devices. The current paper deals with an extended geometrical-optical approach to non-goniometric scatterometerdesign, suitable for highly unsymmetrical and off-axis devices.
机译：在先前的论文通过catadioptricalscatterometrical设备的成像装置中的孔的散射分布的基本问题已被证明是可还原成的苛性碱的成像 - 用作主元件优选的椭圆反射镜。在一个几何光学方法中，该苛性碱是成为mappedonto一个平面传感器由二次成像光学装置的对象。由于苛性不是平面对象，护理hasto应采取的次级光学的深度的领域。而在对称对齐苛性的areaof兴趣通常被当作一个平面垂直于光轴平足够，在所谓的截止axisdevices称为Scheimpflug-和铰链的原则的条件违反变得显着。 Similarproblems发生在dioptrical设备主要孔径图像。具有扩展的几何光学方法来非测角scatterometerdesign当前纸张交易，适合高度不对称和离轴设备。

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