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Rough surface scatterometry of bodies with rotational symmetry

机译：具有旋转对称的粗糙表面散射测定法

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Scatterometry of macroscopically plane surfaces with micro-roughness by using quasi-parallel illumination iswidely investigated. Measuring light scatter from surfaces with a certain macroscopical curvature under thesame conditions leads to the question of distinguishing the effects of micro-roughness from those of curvaturein the resulting scatter distribution. This is especially true for micro-roughness far beyond the smooth surfacecriterion. For example, the scatter distribution of a cone with comparatively heavy traces of machining alonga plane through the axis of symmetry will be wide-spread perpendicularly to that plane for both reasons, thescatter pattern of the machining marks and the curvature of the surface. To extract the desired scatter pattern,the curvature has to be compensated by means of additional optical systems. The current paper deals withtheory and basic design approaches, which are to be continued in follow-up papers.
机译：通过逐时地研究了通过使用准分行照射微观粗糙度的宏观平面表面的散射。测量从Chesame条件下的某种宏观曲率的表面散射，导致将微粗糙度与曲率的散射分布的影响区分的问题。对于远远超出光滑的表面分光镜的微粗糙度尤其如此。例如，通过对称轴线通过对称轴线加工的锥体的散射分布将垂直于该平面垂直于该平面，因为这两种原因，加工标记的图案和表面的曲率。为了提取所需的散射图案，必须通过附加光学系统补偿曲率。目前的论文涉及地理和基本的设计方法，这些方法将继续在随访论文中。

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