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Extremely high temperature and high pressure (x-HTHP) endurable SOI device sensor packaging for deep sea, oil and gas applications

机译:适用于深海,石油和天然气应用的极高温度和高压(x-HTHP)耐久SOI设备和传感器包装

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The extremely high temperature and high pressure endurable (250°C/30 kspi) SOI based temperature sensor and voltage regulator module was developed for harsh environment application such as deep sea, oil & gas down-hole drilling and aerospace engine electronics. The hermetically sealed metal casing which can withstand external pressure up to 30 kpsi was designed and optimized through mechanical modeling and characterization. In side of this hermetic casing, the physical layout of SOI devices and ruggedized components for temperature sensor and voltage regulator was fabricated on ceramic substrate assembled by high temperature endurable interconnection materials such as Au-Sn, Au-Ge and Ag sintering materials. The developed modules are tested with specified reliability testing criteria and evaluation results shows that the packaging and interconnection showed still functional after high temperature storage (HTS) test of 250°C for 500 h and temperature cycling condition -55°C~250°C for 500 cycles. Also passed 30 kpsi pressure cycling and other deep sea and down hole drilling environment test. Those results demonstrate that current SOI sensor module with hermetically sealed metal casing package's design, material and process are considered to be applicable for extreme-HTHP application meeting huge demands in automotive, aerospace engine electronics, down-hole drilling, geothermal and deep sea applications for future.
机译:基于超高温和耐高压(250°C / 30 kspi)SOI的温度传感器和电压调节器模块是为苛刻的环境应用而开发的,例如深海,石油和天然气井下钻探以及航空航天电子设备。通过机械建模和特性设计和优化了可以承受高达30 kpsi外部压力的全密封金属外壳。在该密封外壳的侧面,SOI器件以及用于温度传感器和稳压器的加固组件的物理布局是在由耐高温互连材料(例如Au-Sn,Au-Ge和Ag烧结材料)组装而成的陶瓷基板上制成的。所开发的模块已按照指定的可靠性测试标准进行了测试,评估结果表明,在250°C的高温储存(HTS)测试500小时和-55°C〜250°C的温度循环条件下,封装和互连仍可正常工作500个循环。还通过了30 kpsi的压力循环等深海和井下钻井环境测试。这些结果表明,目前具有气密性金属外壳封装的SOI传感器模块的设计,材料和工艺被认为适用于极限高温高压应用,可满足汽车,航空航天发动机电子,井下钻井,地热和深海应用中的巨大需求未来。

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