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TRANSIENT METHOD FOR LIFETIME CHARACTERIZATION OF MONOCRYSTALLINE SI INGOTS

机译:单晶硅锭生命周期表征的暂态方法

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We developed our own realization of photoconductance decay (PCD) lifetime measurement setup optimized for high carrier lifetime mono-Si ingots. The eddy current technique is used to sense the change of the photoconductance, while a 980nm long pulse laser is responsible for the excess charge carrier generation. The system is able to record lines-cans along the ingots. In the case of long carrier diffusion length, the shapes of the recorded transients are not exponential due to the recombination at the surface and due to the continuous in-diffusion of the carriers towards the bulk. It makes the proper extraction of bulk lifetime difficult by applying analytical formulas or simulations. Based on a phenomenological approach we suggest a simple empirical formula to fit the recorded photoconductance decay curves. The exponential decay component of the fitting function is associated with carrier lifetime. It is shown, that the extracted carrier lifetime is sensitive to metallic contamination in the sample, additionally, the extracted curve is independent of the surface conditions of the sample. Thus, this method is fast, simple and reliable, so applicable in industrial quality control protocols.
机译:我们开发了自己的光电导衰减(PCD)寿命测量设置实现,该设置针对高载流子寿命的单晶硅锭进行了优化。涡流技术用于感测光电导的变化,而980nm长的脉冲激光负责产生过多的电荷载流子。该系统能够记录沿铸锭的线罐。在长的载流子扩散长度的情况下,由于在表面的复合以及由于载流子向主体的连续扩散,所记录的瞬变的形状不是指数的。通过应用分析公式或模拟,很难正确地提取散装寿命。基于现象学方法,我们提出了一个简单的经验公式来拟合记录的光电导衰减曲线。拟合函数的指数衰减分量与载流子寿命相关。结果表明,提取的载流子寿命对样品中的金属污染敏感,此外,提取的曲线与样品的表面条件无关。因此,该方法快速,简单且可靠,因此可应用于工业质量控制协议中。

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