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MICROSTRUCTURE STUDY OF LASER-OPENED REAR CONTACTS ON PERC SOLAR CELLS

机译:激光对PERC太阳能电池的后部接触的微观结构研究

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Laser processing of wafers for solar cell production is used i.e. for the application of local laser ablation of dielectric materials for PERC solar cell processing. In the present study 3 different laser-sources and parameters were used for local-contact openings (LCO) on the rear side of the wafer with subsequent metallization. For a microstructure analysis cross-sections have been prepared and investigated by means of scanning electron microscopy (SEM) and energy-dispersive X-ray analysis (EDX). We detected in addition to the rear contacts with Al/Si-phase (filled contact) formed voids (void contact) at expected filled contact positions which are caused by the Kirkendall effect. Filled and void contacts are found to be comparable in size and shape. Void contacts can be differentiated in total and intermediate void formations. Detailed measurements revealed information about local rear contact doping in according to the type of formed contact as well as microstructural details of the initial state of the void contact formation process.
机译:用于太阳能电池生产的晶片的激光加工被用于,即用于电介质材料的局部激光烧蚀,以用于PERC太阳能电池加工。在本研究中,使用了3种不同的激光源和参数用于晶圆背面的局部接触开口(LCO),随后进行了金属化处理。对于显微结构分析,已经准备了横截面,并通过扫描电子显微镜(SEM)和能量色散X射线分析(EDX)进行了研究。我们还检测到在后部触点中,Al / Si相(填充触点)在由Kirkendall效应引起的预期填充触点位置处形成了空隙(无效触点)。发现填充触点和空隙触点在大小和形状上都是可比的。空隙接触可以在总空隙形成和中间空隙形成之间有所区别。详细的测量揭示了根据形成的接触的类型的有关局部后接触掺杂的信息以及空隙接触形成过程的初始状态的微观结构细节。

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