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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >A novel discharge system based on jagged electrodes with controllable spacing
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A novel discharge system based on jagged electrodes with controllable spacing

机译：基于间距可控的锯齿状电极的新型放电系统

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摘要

A discharge system with jagged electrodes gap fabricated by MEMS fabrication technique was proposed in this paper. By utilizing a voltage multiplier as energy accumulation module, repeatedly spark breakdown in air was performed through this designed electrodes. Finite element analysis has been done for simulating the arc generation. The device was fabricated by MEMS process and relative experiments were carried out. Through the damage on the two electrodes which further investigated by the microscope images, the arc generation of this device was confirmed. This novel discharge system has promising applications in sterilization, ozone production and arc lightening, etc.
机译：提出了一种利用MEMS制造技术制造的具有锯齿状电极间隙的放电系统。通过使用倍增器作为能量累积模块，通过这种设计的电极反复进行了空气中的火花击穿。为了模拟电弧的产生，已经进行了有限元分析。该器件是通过MEMS工艺制造的，并进行了相关实验。通过在两个电极上的损坏（进一步由显微镜图像检查），证实了该装置的电弧产生。这种新颖的排放系统在杀菌，臭氧产生和电弧减薄等方面具有广阔的应用前景。

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