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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >Design of a new 5-DOF flexure-based nanopositioning stage
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Design of a new 5-DOF flexure-based nanopositioning stage

机译：基于屈曲的新型5自由度纳米定位平台的设计

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摘要

In this paper, the design of a new compliant five-axis parallel nanopositioning stage driven by PZT actuators is presented, which is based on flexure mechanism. The flexure stage contains two kinds of displacement amplifiers based on simple lever principle and bridge principle, respectively. The lever structure is designed to meet the requirement of the change of direction of the output displacement. The double-bridge amplifier can achieve the large displacement by overcoming the stroke limitation of the actuator. Each pair of actuators realizes the translational displacement in one axis and the rotation in one plane. The flexure stage with three pairs of actuators can obtain 5-DOF motion as the rotation in XY-plane is redundant. FEA simulation is conducted to verify the dimension of the designed stage. Results demonstrate the performance of the designed multi-axis nanopositioning stage.
机译：在本文中，提出了一种基于挠性机构的，由PZT致动器驱动的新型顺应性五轴平行纳米定位平台的设计。挠曲级包含两种基于简单杠杆原理和桥原理的位移放大器。杠杆结构旨在满足输出位移方向变化的要求。通过克服执行器的行程限制，双桥放大器可以实现大位移。每对执行器实现一个轴上的平移位移和一个平面上的旋转。由于在XY平面上的旋转是多余的，所以具有三对执行器的挠性平台可以获得5-DOF运动。进行有限元分析以验证设计阶段的尺寸。结果证明了设计的多轴纳米定位平台的性能。

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