The technology of micro-operation robot is not only an important component in MEMS (Micro Electro Mechanical Systems), but also a new highlight in robot technology as well. Especially, precision position technology driven by PZT actuator is indispensability part in micro-operation robot. This article focuses on precision position technology in micro-operation robot based on inertial stick-slip driving. It comes true that trans-scale micro-operation robot, with not only nanometer positioning accuracy, but also millimeter moving range even greater movement scale, has been produced. In this paper, the principle of the inertial stick-slip driving has been introduced. Besides, every phase of the process also has been described in detail. In order to uncover the movement process of inertial stick-slip driving, the mathematical model is established. The experimental prototype on the basis of principle is designed and produced. Lastly, some system parameters affecting on the velocity of the prototype have been discussed in the experiment.
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