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Designer Ge quantum-dot phototransistors for highly-integrated, broadband optical interconnects

机译:设计师Ge量子点光电晶体管,用于高度集成的宽带光学互连

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We report high-responsivity Ge quantum dots (QDs) MOS phototransistors as on-chip transducers for highly-integrated, broadband Si-based optical interconnects. Self-organized heterostructure of Ge-QD/SiO2/Si-channel is fabricated in a single step through selective oxidation of SiGe nano-pillars over a Si3N4 buffer layer on Si substrates. Dark current densities (10-7A/mm2), photocurrent-to-dark current ratio (~ 107) and photoresponsivities (>10 A/W), external quantum efficiency (~240%), and response time (1.4ns) are measured on the Ge-QD phototransistors under 850 nm illumination. Detection wavelength is tunable from near infrared to near ultraviolet by reducing the QD size from 90 to 7 nm, and the optimal photoresponsivity is tailored by the QD size and effective thickness of gate dielectrics.
机译:我们报告高响应性Ge量子点(QD)MOS光电晶体管作为片上换能器,用于高度集成的宽带Si基光学互连。 Ge-QD / SiO2 / Si通道的自组织异质结构是通过在Si衬底上的Si3N4缓冲层上选择性氧化SiGe纳米柱而在单个步骤中制造的。测量暗电流密度(10-7A / mm2),光电流与暗电流之比(〜107)和光响应(> 10 A / W),外部量子效率(〜240%)和响应时间(1.4ns)在850 nm光照下的Ge-QD光电晶体管上。通过将QD尺寸从90 nm减小到7 nm,可以将检测波长从近红外调谐到近紫外,并且通过QD尺寸和栅极电介质的有效厚度来定制最佳光响应性。

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