Optimization of finger spacing and spring constant in comb type capacitive accelerometer

机译：梳型电容式加速度计的指距和弹簧常数的优化

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摘要

In variable gap changing capacitive accelerometer with two different gap spacing (finger gap and anti-finger gap) it is necessary to optimize the gap spacing to enhance sensitivity. In addition the spring constant must also be optimize to produce linear change of displacement with acceleration. In the present paper numerical simulations are carried out in CoventorWare and Matlab to find the optimum value of both parameters.

机译：在具有两个不同间隙间隔（手指间隙和反手指间隙）的可变间隙变化电容式加速度计中，有必要优化间隙间隔以提高灵敏度。另外，还必须优化弹簧常数以产生位移随加速度的线性变化。在本文中，在CoventorWare和Matlab中进行了数值模拟，以找到两个参数的最佳值。

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《IEEE International Nanoelectronics Conference》|2016年|1-2|共2页
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Zakriya Mohammed; Mahmoud Rasras;
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关键词
Capacitance; Accelerometers; Fingers; Sensitivity; Acceleration; Springs; Micromechanical devices;

机译：电容;加速度计;手指;灵敏度;加速度;弹簧;微机械装置;

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4. Optimization of finger spacing and spring constant in comb type capacitive accelerometer [C] . Zakriya Mohammed, Mahmoud Rasras IEEE International Nanoelectronics Conference . 2016

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Optimization of finger spacing and spring constant in comb type capacitive accelerometer

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