Determination of key factors for low temperature graphene synthesis using design of experiments approach

机译：通过实验设计确定低温石墨烯合成的关键因素

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A method to determine key control-factors for low temperature synthesis of Graphene using Plasma-Enhanced CVD is demonstrated in this work. Fractional-Factorial experiments are performed in order to accurately determine the control-factors while keeping the number of experimental runs to minimum. Temperature, RF power and deposition time are found to be the important controlling factors on the basis of attribute response analysis. Experimental verification of the predicted outcome for a given level of each factor is demonstrated.

机译：在这项工作中演示了一种确定使用等离子增强CVD低温合成石墨烯的关键控制因素的方法。为了使控制因子准确地确定，同时将实验运行次数保持在最低水平，进行了小数部分实验。在属性响应分析的基础上，发现温度，RF功率和沉积时间是重要的控制因素。实验证明了给定水平的每个因素的预测结果。

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《IEEE International Nanoelectronics Conference》|2016年|1-2|共2页
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Udit Narula; Chao Sung Lai; Cher Ming Tan;
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关键词
Graphene; Plasma temperature; Carbon; Temperature; Films; Temperature control; Radio frequency;

机译：石墨烯;等温;碳;温度;薄膜;温度控制;射频;

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Determination of key factors for low temperature graphene synthesis using design of experiments approach

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