Research on sub-surface damage and its stress deformation in the process of large aperture and high diameter-to-thickness ratio TMT M3MP

机译：大口径高厚比TMT M3MP过程中的亚表面损伤及其应力变形研究

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Large flat mirrors play important roles in large aperture telescopes. However, they also introduce unpredictable problems. The surface errors created during manufacturing, testing, and supporting are all combined during measurement, thus making understanding difficult for diagnosis and treatment. Examining a high diameter-to-thickness ratio flat mirror, TMT M3MP, and its unexpected deformation during processing, we proposed a strain model of subsurface damage to explain the observed phenomenon. We designed a set of experiment, and checked the validity of our diagnosis. On that basis, we theoretical predicted the trend of this strain and its scale effect on Zerodur®, and checked the validity on another piece experimentally. This work guided the grinding-polishing process of M3MP, and will be used as reference for M3M processing as well.

机译：大型平面镜在大口径望远镜中起着重要的作用。但是，它们也带来了无法预料的问题。在制造，测试和支撑过程中产生的表面误差都在测量过程中结合在一起，因此难以理解以进行诊断和处理。通过检查高直径厚度比的平面镜TMT M3MP及其在加工过程中的意外变形，我们提出了地下损伤的应变模型来解释观察到的现象。我们设计了一组实验，并检查了诊断的有效性。在此基础上，我们从理论上预测了该菌株的趋势及其对Zerodur®的规模效应，并通过实验检验了另一片产品的有效性。这项工作指导了M3MP的抛光过程，并且也将用作M3M处理的参考。

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《International symposium on advanced optical manufacturing and testing technologies》|2016年|96820A.1-96820A.7|共7页
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Hai-xiang Hu; Er-hui Qi; Glen Cole; Hai-fei Hu; Xiao Luo; Xue-jun Zhang;
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large mirror; flat; sub-surface damage; strain; TMT;

机译：大镜子平面;地下破坏;应变; TMT;

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2. Sapphire advanced mitigation process: wet etch to expose sub-surface damage and increase laser damage resistance and mechanical strength [J] . Applied optics . 2020,第6期

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3. Gas cluster ion beam processing of gallium antimonide wafers for surface and sub-surface damage reduction [J] . Li X., Goodhue WD., Santeufeimio C., Applied Surface Science . 2003,第1a4期

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4. Research on sub-surface damage and its stress deformation in the process of large aperture and high diameter-to-thickness ratio TMT M3MP [C] . Hai-xiang Hu, Er-hui Qi, Glen Cole, International symposium on advanced optical manufacturing and testing technologies . 2016

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5. Polarimetric Synthetic Aperture Radar Image Processing and Applications for Earthquake/Tsunami Damage Assessment [D] . JI, Yaqi 2019

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6. An Improved Analytical Solution for Process-Induced Residual Stresses and Deformations in Flat Composite Laminates Considering Thermo-Viscoelastic Effects [O] . Chao Liu, Yaoyao Shi 2018

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Research on sub-surface damage and its stress deformation in the process of large aperture and high diameter-to-thickness ratio TMT M3MP

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