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Fabrication of large-aperture, high efficiency, Fresnel diffractive membrane optic for space telescope

机译：大口径，高效率，用于太空望远镜的菲涅耳衍射膜片光学元件的制造

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Diffractive optical system can be a favorable choice for large-aperture space telescope to reduce the mass and size of image system. To meet the demand of large-aperture, high efficiency, lightweight diffractive optic for high resolution remote sensing, a 200 mm diameter, 20 μm thick, 4-level diffractive membrane fabricated is shown to have over 62% diffraction efficiency into the +1 order, with 0.051 efficiency RMS. Over 66% diffraction efficiency is achieved for a 100 mm aperture membrane, with 0.023 efficiency RMS. The membrane thickness uniformity control is discussed and 8 nm wave front error RMS is achieved in 100 mm diameter.
机译：衍射光学系统可能是大口径太空望远镜降低图像系统质量和尺寸的理想选择。为了满足用于高分辨率遥感的大口径，高效，轻量级衍射光学器件的需求，制造的直径为200 mm，厚度为20μm的4级衍射膜的+1级衍射效率超过62％。 ，效率RMS为0.051。 100 mm孔径的膜的衍射效率超过66％，有效值RMS为0.023。讨论了膜厚度均匀性控制，并在100 mm直径下获得了8 nm的波前误差RMS。

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