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Statistical design attribute identification for FinFET outlier and Silicon-to-SPICE gap

机译:FINFET异常值和硅与香料间隙的统计设计属性识别

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From FinFET test vehicle data, outlier is discriminated based on Mahalanobis distance, large Silicon-to-SPICE gap (S2S gap) device is defined, and significant design attributes are analyzed as the root causes of them. In order to analyze this, attribute commonality is defined and calculated based on Monte-Carlo method to identify specific design attributes which are commonly and specifically observed in outlier and large S2S gap device. By narrowing down the design attributes by decision tree using the attribute commonality as decision criterion, the representative structure is identified. The methodology was applied to 14nm and 10nm FinFET with variety of actual layout structures used in product chip.
机译:从FinFET测试车辆数据,基于Mahalanobis距离对异常值进行区分,定义了大的硅 - Spice间隙(S2S间隙)设备,并且将显着的设计属性作为它们的根本原因分析。为了分析这一点,基于Monte-Carlo方法来定义和计算属性共性,以识别在异常值和大S2S间隙装置中通常和专门地观察到的特定设计属性。通过使用属性共性作为决策标准来缩小设计属性,识别代表性结构。该方法应用于14nm和10nm FinFET,具有产品芯片中使用的各种实际布局结构。

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