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Accurate modeling of silicon-based substrates for sub-THz antennas

机译:太赫兹天线的硅基衬底的精确建模

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The article describes a convenient way to numerically model antennas for sub-THz radiation detectors while accounting for multiple oxide layers included in typical silicon substrates used in microelectronic technologies. Several approaches are presented, including a solution based on calculations of effective permittivity of the layered substrate. The results suggest that this approach can work at lower frequencies, but will not be effective in the sub-THz range due to different mechanisms of dispersion occurring in transmission lines with homogeneous or layered substrate.
机译:本文介绍了一种方便的方法,可以对次太赫兹辐射探测器的天线进行数值建模,同时考虑微电子技术中使用的典型硅基板中包含的多个氧化物层。提出了几种方法,包括基于层状基板的有效介电常数的计算的解决方案。结果表明,该方法可以在较低的频率下工作,但由于在具有均质或分层衬底的传输线中会出现不同的色散机制,因此在亚太赫兹范围内将无效。

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