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Resolution, measurement errors and uncertainties on deflectometric acquisition of large optical surfaces 'DaOS'

机译：大光学表面“ DaOS”的偏转测量的分辨率，测量误差和不确定性

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The basic physical measurement principle in DaOS is the vignettation of a quasi-parallel light beam emitted by an expanded light source in auto collimation arrangement. The beam is reflected by the surface under test, using invariant deflection by a moving and scanning pentaprism. Thereby nearly any curvature of the specimen is measurable. Resolution, systematic errors and random errors will be shown and explicitly discussed for the profile determination error. Measurements for a "plano-double-sombrero" device will be analyzed and reconstructed to find out the limit of resolution and errors of the reconstruction model and algorithms. These measurements are compared critically to reference results that are recorded by interferometry and Deflectometric Flatness Reference (DFR) method using a scanning penta device.
机译：DaOS中的基本物理测量原理是自动准直装置中的扩展光源发出的准平行光束的渐晕。光束通过移动和扫描五棱镜的不变偏转而被测试表面反射。因此，几乎任何样品的曲率都是可以测量的。将显示分辨率，系统误差和随机误差，并对轮廓确定误差进行明确讨论。将分析和重建“平双帽”设备的测量结果，以找出分辨率的极限以及重建模型和算法的误差。严格地将这些测量结果与参考结果进行比较，这些参考结果是使用扫描五边形设备通过干涉法和偏光平坦度参考（DFR）方法记录的。

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