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首页> 外文会议>European seminar on precision optics manufacturing >Flatness metrology based on small-angle deflectometric procedures with electronic tiltmeters
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Flatness metrology based on small-angle deflectometric procedures with electronic tiltmeters

机译：基于带电子测斜仪的小角度偏转程序的平面度测量

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The measurement of optical flats, e. g. synchrotron or XFEL mirrors, with single nanometer topography uncertainty is still challenging. At PTB, we apply for this task small-angle deflectometry in which the angle between the direction of the beam sent to the surface and the beam detected is small. Conventional deflectometric systems measure the surface angle with autocollimators whose light beam also represents the straightness reference. An advanced flatness metrology system was recently implemented at PTB that separates the straightness reference task from the angle detection task. We call it 'Exact Autocollimation Deflectometric Scanning' because the specimen is slightly tilted in such a way that at every scanning position the specimen is 'exactly' perpendicular to the reference light beam directed by a pentaprism to the surface under test. The tilt angle of the surface is then measured with an additional autocollimator. The advantage of the EADS method is that the two tasks (straightness reference and measurement of surface slope) are separated and each of these can be optimized independently. The idea presented in this paper is to replace this additional autocollimator by one or more electro-mechanical tiltmeters, which are typically faster and have a higher resolution than highly accurate commercially available autocollimators. We investigate the point stability and the linearity of a highly accurate electronic tiltmeter. The pros and cons of using tiltmeters in flatness metrology are discussed.
机译：光学平板的测量，例如G。具有单纳米形貌不确定性的同步加速器或XFEL反射镜仍然具有挑战性。在PTB，我们为此任务申请了小角度偏转技术，其中，发送到表面的光束方向与检测到的光束之间的角度很小。常规的偏转系统使用自动准直仪测量表面角度，这些准直仪的光束也代表直线度基准。最近在PTB实施了先进的平面度测量系统，该系统将直线度参考任务与角度检测任务分开。我们称其为“精确自准直偏转扫描”是因为样品略微倾斜，使得样品在每个扫描位置都“完全”垂直于五棱镜指向被测表面的参考光束。然后使用附加的自动准直仪测量表面的倾斜角度。 EADS方法的优点是两个任务（直线度参考和表面坡度的测量）是分开的，并且每个任务都可以独立优化。本文提出的想法是用一个或多个机电式倾斜仪代替这种附加的自动准直仪，该倾斜仪通常比市售的高精度自动准直仪更快且具有更高的分辨率。我们研究了高精度电子倾角仪的点稳定性和线性度。讨论了在平面度测量中使用倾斜计的利弊。

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