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Polarization-Fizeau interferometer enabling phase measurement with reduced uncertainty

机译：Polarize-Fizeau干涉仪，可降低不确定度，进行相位测量

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摘要

A Fizeau interferometer is significantly less sensitive to vibrations and air turbulence than other types of interferometers. This is due to the common path of the reference wave front and the object wave front. A common path arrangement offers the opportunity to reduce systematic errors of the measured phase of the surface under test (SUT). That is why Fizeau type interferometers are most commonly used to test e.g. plane surfaces, spheres or aspheres. A reduced uncertainty of the measured phase distribution can be obtained if the reference surface is placed close to the SUT. Multiple beam reflections will produce interference fringes, which are not sinusoidal. Furthermore, the discrete intensity distribution depends on the reflectivity of the reference surface and the reflectivity of the SUT. Some surfaces to be tested show significant variations of the local reflectivity, e.g. lithographic masks with 0.05 < r(x,y) < 0.95. Thus, the inherent potential of phase shifting algorithms cannot be used. A modification of the reference surface can be applied. An on-axis polarization beam splitter, which is placed in the plane of the reference surface, separates the two surfaces, which are imaged onto the detector. Thus, true two beam interference can be obtained. The potential of phase shifting algorithms can be used. The interference contrast is high, even if large local variations of r(x,y) are present. In addition, high speed operation is enabled. The embodiment of a modified Fizeau type interferometer will be described.
机译：与其他类型的干涉仪相比，Fizeau干涉仪对振动和空气湍流的敏感性显着降低。这归因于参考波前和物波前的共同路径。公用路径安排为减少被测表面（SUT）的被测相位的系统误差提供了机会。这就是为什么Fizeau型干涉仪最常用于测试例如平面，球面或非球面。如果将参考表面放置在靠近SUT的位置，则可以减少测量到的相位分布的不确定性。多次光束反射会产生非正弦的干涉条纹。此外，离散强度分布取决于参考表面的反射率和SUT的反射率。某些要测试的表面显示出局部反射率的显着变化，例如0.05

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