Reconfigurable AlN resonator filter design based on extended statistical element selection

机译：基于扩展统计元素选择的可重构AlN谐振器滤波器设计

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This paper reports on a novel reconfigurable design for an aluminum nitride (AlN) MEMS resonator filter with a GHz level center frequency (f). Measurement of resonators fabricated by an AlN foundry indicates roughly linear dependence of f on filter location due to process variation over a 4 mm die area. To improve f performance yield, an Extended Statistical Element Selection (ESES) approach is implemented. The measured ESES 50 Ω matched filter demonstrates a 10× improvement in success rate for meeting the f target of 1.16 GHz within a ±20 kHz tolerance.

机译：本文报告了一种新颖的可重构设计，用于具有GHz级中心频率（f）的氮化铝（AlN）MEMS谐振器滤波器。由AlN铸造厂制造的谐振器的测量结果表明，由于4 mm芯片面积上的工艺变化，f对滤波器位置的线性关系大致。为了提高性能收益，实施了扩展统计元素选择（ESES）方法。测得的ESES 50Ω匹配滤波器证明，在±20 kHz容差范围内，满足1.16 GHz f目标的成功率提高了10倍。

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《International Conference on Solid-State Sensors, Actuators and Microsystems》|2017年|2087-2090|共4页
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Jinglin Xu; Srinivas Merugu; Navab Singh; Gianluca Piazza; Lawrence Pileggi; Gary K. Fedder;
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Resonator filters; Resonant frequency; Aluminum nitride; Fingers; III-V semiconductor materials; Tuning; Semiconductor device measurement;

机译：谐振滤波器;谐振频率;氮化铝;手指; III-V族半导体材料;调谐;半导体器件测量;

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4. Reconfigurable AlN resonator filter design based on extended statistical element selection [C] . Jinglin Xu, Srinivas Merugu, Navab Singh, International Conference on Solid-State Sensors, Actuators and Microsyste-ms . 2017

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5. Design and synthesis techniques for reconfigurable microwave filters using single and dual-mode resonators [D] . Lugo, Cesar A., Jr. 2006

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Reconfigurable AlN resonator filter design based on extended statistical element selection

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