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首页> 外文会议>International Conference on Solid-State Sensors, Actuators and Microsystems >Residual-stress-balanced piezoelectric film based direction sensitive flow shear-stress sensor for quadcopter navigation
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Residual-stress-balanced piezoelectric film based direction sensitive flow shear-stress sensor for quadcopter navigation

机译：基于残余应力平衡的压电薄膜方向敏感流四轴飞行器剪切应力传感器

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This paper presents an innovative piezoelectric thin-film based flow shear stress sensor fabricated by micromachining and stereolithography. The sensor has three novelties: Use hydrothermal method to simultaneously grow lead zirconate titanate (PZT) films on both sides of micromachined titanium cantilever beams. This results in an approximately zero stress gradient in the thickness direction of the sensing beam due to residue stress balance. Directly fabricate 3-dimensional high aspect ratio structure array on the micromachined planar structure by sterorelithograhy. This allows the measurands effectively to couple with the sensing beams. Using the unique 3D photopolymer structure array for sensing coupling, the detected flow direction and the shear stress caused by measured flow can be identified and evaluated. The detailed fabrication process and preliminary characterization results are described.
机译：本文提出了一种创新的基于压电薄膜的流变应力传感器，该传感器是通过微加工和立体光刻技术制造的。该传感器具有三个新颖之处：使用水热法在微机械加工的钛悬臂梁的两侧同时生长锆钛酸铅（PZT）膜。由于残余应力平衡，这导致在传感束的厚度方向上的应力梯度大约为零。通过sterorelithograhy在微加工的平面结构上直接制造3维高纵横比结构阵列。这允许被测物有效地与感测光束耦合。使用独特的3D光聚合物结构阵列来感应耦合，可以识别和评估检测到的流向和由测得的流量引起的切应力。描述了详细的制造过程和初步表征结果。

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