Study on the influence induced by electrical coupling among interconnection lines in MEMS gyroscopes

机译：MEMS陀螺仪互连线之间电耦合引起的影响研究

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This paper analyzes the influence of the electrical coupling among interconnection lines in MEMS gyroscopes and proposes strategies during designing structure to eliminate its effect. Moreover, a compensation circuit is designed to further suppress coupling signal at the readout. The results of bias drift tests under full temperature range indicate that not only the bias drift in the vacuum is much smaller than at atmospheric pressure, but also the coupling signal can be decayed efficiently after compensation. The fluctuation of the bias drift is decreased by 95.5% at atmospheric pressure while 89.1% in the vacuum.

机译：本文分析了MEMS陀螺仪中互连线之间电耦合的影响，并提出了在结构设计过程中消除其影响的策略。此外，设计了补偿电路以进一步抑制读出时的耦合信号。在整个温度范围内进行偏置漂移测试的结果表明，不仅真空中的偏置漂移远小于大气压下的偏置漂移，而且补偿后，耦合信号也可以有效衰减。偏置漂移的波动在大气压下减小了95.5％，而在真空中减小了89.1％。

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《International Conference on Solid-State Sensors, Actuators and Microsystems》|2017年|1088-1091|共4页
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作者
M. J. Li; Y. P. Wang; Q. C. Zhao; C. H. He; L. T. Lin; J. F. Yang; G. Z. Yan;
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Couplings; Capacitance; Gyroscopes; Micromechanical devices; Electrodes; Integrated circuit interconnections; Wires;

机译：联轴器;电容;陀螺仪;微机械设备;电极;集成电路互连;电线;

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4. Study on the influence induced by electrical coupling among interconnection lines in MEMS gyroscopes [C] . M. J. Li, Y. P. Wang, Q. C. Zhao, International Conference on Solid-State Sensors, Actuators and Microsyste-ms . 2017

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Study on the influence induced by electrical coupling among interconnection lines in MEMS gyroscopes

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