The microrailgun: A new class of high velocity microactuator

机译：微型轨道炮：新型的高速微型执行器

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Unlike linear current Lorentz force actuators, μ-railguns generate forces proportional to the square of current producing very high forces and velocities when driven by ultrafast capacitor discharges. μ-railguns were fabricated on an SOI wafer with 15 μm thick device layer. A test set-up was built for high speed capacitive discharge and synchronous stroboscopic imaging of device under actuation. Initial results demonstrate μ-railguns with actuation velocity of 45 m/s at resonant frequency of ~1 MHz, nearly 2 times higher than possible with PZT piezoelectrics.

机译：与线性电流洛伦兹力执行器不同，μ轨道炮在超快电容器放电驱动下会产生与电流平方成比例的力，从而产生非常高的力和速度。在具有15μm厚器件层的SOI晶圆上制造了μ轨道炮。建立了一个测试装置，用于在致动下对设备进行高速电容放电和同步频闪成像。初步结果表明，μ轨道炮在〜1 MHz的共振频率下具有45 m / s的致动速度，几乎是PZT压电装置的2倍。

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《International Conference on Solid-State Sensors, Actuators and Microsystems》|2017年|2027-2030|共4页
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Shashank S. Pandey; A. Banerjee; M. Karkhanis; Carlos H. Mastrangelo;
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Railguns; Microactuators; Light emitting diodes; Discharges (electric); Projectiles; Capacitors;

机译：轨道炮;微致动器;发光二极管;放电（电）;弹丸;电容器;

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4. The microrailgun: A new class of high velocity microactuator [C] . Shashank S. Pandey, A. Banerjee, M. Karkhanis, International Conference on Solid-State Sensors, Actuators and Microsyste-ms . 2017

机译：Microrailgun：一类新的高速微致动器
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The microrailgun: A new class of high velocity microactuator

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