A novel inertial microswitch with synchronous follow-up compliant electrodes for extending output switch-on pulse width

机译：一种新颖的惯性微动开关，具有同步跟随顺应电极，用于扩展输出接通脉冲宽度

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This paper reports a novel inertial microswitch with synchronous follow-up compliant electrodes for extending output switch-on pulse width. The flexible movable electrode and stationary electrode are proposed to keep a continuous duration contact by double-stair and spring-shape structures, which can not only extend the output switch-on pulse width but also reduce the impact bounces. Then the inertial microswitch has been fabricated using surface micromachining and multilayer electroplating technology. The comparison testing results show that there is no contact bouncing behavior can be observed under ~466g half sine-wave shock acceleration and the test output switch-on pulse width can reach 390μs, which is longer than that in the traditional design.

机译：本文报道了一种具有同步后续兼容电极的新型惯性微动开关，用于延长输出接通脉冲宽度。提出了柔性可动电极和固定电极以通过双层和弹簧形结构保持连续持续时间接触，这不仅可以延长输出接通脉冲宽度，而且还可以减少冲击弹跳。然后使用表面微机械线和多层电镀技术制造惯性微动开关。比较测试结果表明，在大约466克半正弦波冲击加速下可以观察到没有接触弹跳行为，并且测试输出接通脉冲宽度可以达到390μs，这比传统设计中的长度长。

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《International Conference on Solid-State Sensors, Actuators and Microsystems》|2017年|2015-2018|共4页
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Q. Xu; Z. Q. Yang; Y. N. Sun; J. B. Luo; H. F. Li; G. F. Ding; X. L. Zhao; J. Y. Yao; J. Wang;
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Electrodes; Microswitches; Acceleration; Contacts; Nickel; Fabrication;

机译：电极;微动开关;加速度;触点;镍;制造;

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1. Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration [J] . Xu Qiu, Sun Bin, Li Yigui, Sensors and Actuators, A. Physical . 2018,第期

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2. Tri-axial all-metal inertial microswitch with compliant stationary electrodes to prolong contact time [J] . Wenguo Chen, Zhaoyu Wang, Yan Wang, Micro & Nano Letters, IET . 2014,第8期

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3. Design and characterisation of an inertial microswitch with electrophoretic polymer-metal composite fixed electrode for extending contact time [J] . Zhu B. Micro & Nano Letters, IET . 2012,第5期

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4. A novel inertial microswitch with synchronous follow-up compliant electrodes for extending output switch-on pulse width [C] . Q. Xu, Z. Q. Yang, Y. N. Sun, International Conference on Solid-State Sensors, Actuators and Microsyste-ms . 2017

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8. Solid state pulse generator with constant output width, for variable input width, in nanosecond range Patent [R] . Garrahan, N. M. 1968

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A novel inertial microswitch with synchronous follow-up compliant electrodes for extending output switch-on pulse width

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