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Inductive Displacement Sensors Based on the Integrated Demodulation Chip

机译:基于集成解调芯片的电感式位移传感器

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As an important component of a high-speed active magnetic bearing (AMB) system, a non-contact displacement sensor has important impacts on the overall performance of the system. A traditional inductive displacement sensor signal demodulation circuit which is composed of discrete components, has a high cost and a large space occupation. In order to develop a low-cost, high-integrated demodulation design of an inductive displacement sensor, this paper took the integrated synchronous demodulation chip as the core, performed tasks including the hardware design and manufacturing, software development and circuit debugging, built a test platform of the inductive displacement sensor and finished evaluation experiments for the integrated synchronous demodulation design. The experimental results shown that the linearity between the synchronous demodulation chip output signal and rotor displacement was 2.187%, the sensitivity was 2.9185 V/mm, the minimum resolution was up to 1 u.m, and it could meet the displacement detection requirements of general AMB systems.
机译:作为高速主动磁轴承(AMB)系统的重要组成部分,非接触式位移传感器对系统的整体性能具有重要影响。传统的由分立元件组成的感应式位移传感器信号解调电路成本高,占用空间大。为了开发一种低成本,高集成度的电感式位移传感器的解调设计,本文以集成同步解调芯片为核心,完成了硬件设计与制造,软件开发和电路调试的任务,并进行了测试。感应式位移传感器的平台,并完成了用于集成同步解调设计的评估实验。实验结果表明,同步解调芯片输出信号与转子位移之间的线性度为2.187%,灵敏度为2.9185 V / mm,最小分辨率可达1 um,可以满足一般AMB系统的位移检测要求。 。

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