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Long-MWIR HgCdTe butted linear arrays

机译:长MWIR HgCdTe对接线性阵列

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Abstract: High resolution infrared imaging system calls for very long scanning arrays with several thousands of detectors and high performance. This paper presents the recent technological developments carried out at LETI/LIR on long butted arrays and gives the results obtained on a 1500 detector linear HgCdTe array with a 30 micrometer pitch and a 5.5 micrometer cut-off wavelength. This very large array (length approximately equals 50 mm) has an indirect hybrid architecture composed of 5 butted HgCdTe PV detection circuits and 5 Si CMOS readouts hybridized on a mechanically close-matched fanout substrate. Defect free dicing and butting, respecting the detector pitch, is made by accurate and non damaging techniques. A detailed description of the array and the main electro-optical performances are presented. !7
机译:摘要:高分辨率红外成像系统需要具有数千个探测器和高性能的超长扫描阵列。本文介绍了在LETI / LIR上对长对接阵列进行的最新技术开发,并给出了在1500个探测器线性HgCdTe阵列上获得的结果,该阵列具有30微米的间距和5.5微米的截止波长。这个非常大的阵列(长度大约等于50 mm)具有间接混合体系结构,该体系结构由5个对接的HgCdTe PV检测电路和5个Si CMOS读数在机械紧密匹配的扇出衬底上混合而成。尊重检测器间距的无缺陷切割和对接是通过精确且无损的技术完成的。给出了阵列的详细描述和主要的电光性能。 !7

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