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A Fully Coupled Analysis and Simulation of Capacitively Coupled Radio Frequency Glow Discharges,Application to PWCVD System

机译：电容耦合射频辉光放电的全耦合分析与仿真，在PWCVD系统中的应用

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《2008 IEEE纳米电子学国际会议暨上海纳光电论坛(2nd IEEE International Nanoelectronics Conference Shanghai Nanophotonics and Electronics Forum)论文集》|2008年||共5页
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3. Application of sparse grid combination techniques to low temperature plasmas particle-in-cell simulations.Ⅰ. Capacitively coupled radio frequency discharges [J] . L.Garrigues, B.Tezenas du Montcel, C.Fubiani, Journal of Applied Physics . 2021,第15期

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7. Two-dimensional PIC-MCC simulations of capacitively coupled radio-frequency discharge in methane [O] . Alexandrov, A L, Schweigert, I V 2004

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8. Spectral Analysis and Metastable Absorption Measurements of High Pressure Capacitively and Inductively Coupled Radio-Frequency Argon-Helium Discharges. [R] . Eshel, B. 2013

机译：高压电容和电感耦合射频氩氦放电的光谱分析和亚稳吸收测量。

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