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首页> 外文会议>The 10th International Conference on Ferrites（2008中国国际铁氧体研讨会）论文集 >LTCC-compatible Multilayer Ferrites for Integrated Inductors
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LTCC-compatible Multilayer Ferrites for Integrated Inductors

机译：集成电感器的LTCC兼容多层铁氧体

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Ni-Cu-Zn and Mg-Cu-Zn ferrites were developed for the fabrication ofmultilayer ferrite inductors (MLFI) for monolithic or integrated inductors in complex LTCC modules. Ferrites with <50 mol% Fe203 exhibit enhanced densification and shrinkage behavior. The magnetic properties of the ferrites can be tailored by proper selection of the Cu-concentration, (Ni,Mg)/Zn-ratio and sub-stoichiometry. Sub-micron powders prepared by milling show enhanced sintering activity and high density after firing at 900°C. Nano-size ferrite powders prepared by oxalate co-precipitation process also sinter to high density; maximum shrinkage already occurs at T<800°C. Mixtures of sub-micron and nanosized powders allow tailoring the shrinkage between 700-900°C.Dense samples with homogeneous microstructures and grain sizes of 2 um were prepared; the additive-free samples have a permeability of 800. Addition of up to 1 wt% Bi2O3 tends to significantly influence the ceramic microstructure. Maximum permeability u=920 is observed for 0.37% Bi203 with an inhomogeneous microstructure. Co2Z-type hexagonal ferrites for high frequency applications (1-2 GHz) were synthesized at 1300°C as single phase materials with a permeability of μ=30. The shrinkage was adjusted to 950°C by addition of sintering aids. Co2Z ferrite is not stable at 950°C and partial ferrite decomposition is the origin of the reduction of permeability (μ=5). Ferrite tapes were processed to multilayer inductors. The integration of ferrite and dielectric LTCC tapes was studied. Co-firing of sandwiched laminates was achieved by adaptation of the shrinkage behavior and thermal expansion coefficients of both materials.
机译：Ni-Cu-Zn和Mg-Cu-Zn铁氧体被开发用于制造多层LTCC模块中的单片或集成电感器的多层铁氧体电感器（MLFI）。 Fe 2 O 3 <50 mol％的铁氧体表现出增强的致密化和收缩行为。铁氧体的磁特性可通过在Cu-浓度的适当选择，的（Ni，Mg）的/ Zn的比率和子化学计量来定制。通过研磨制备的亚微米粉末在900°C烧结后显示出增强的烧结活性和高密度。通过草酸盐共沉淀法制备的纳米级铁氧体粉末也烧结成高密度。在T <800°C时已经出现最大收缩率。亚微米级和纳米级粉末的混合物可以调节700-900°C之间的收缩率。制备了具有均匀微观结构和2 um晶粒尺寸的致密样品。不含添加剂的样品的渗透率为800。Bi2O3的添加量最高达1 wt％会显着影响陶瓷的微观结构。对于具有不均匀微观结构的0.37％Bi203，观察到最大磁导率u = 920。高频应用的Co2Z型六角形铁氧体（1-2 GHz）是在1300°C下作为磁导率为μ= 30的单相材料合成的。通过添加烧结助剂将收缩率调节至950℃。 Co2Z铁氧体在950°C时不稳定，部分铁素体分解是磁导率降低的原因（μ= 5）。将铁氧体带加工成多层电感器。研究了铁氧体和电介质LTCC胶带的集成。通过调整两种材料的收缩性能和热膨胀系数，可以实现夹层层压的共烧制。

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