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首页> 外文会议>Fifth international symposium on instrumentation science and technology >DLC Films as Anti-stiction Coatings for MEMS
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DLC Films as Anti-stiction Coatings for MEMS

机译：DLC薄膜作为MEMS防粘涂层

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The stiction of microstructures is still a challenging problem in spite of innovative advances in modern micromachining technology. In this paper, diamond-like carbon films were suggested as a solution for this problem. The microwave electron cyclotron resonance plasma enhanced CVD equipment has been applied to prepare the DLC films. Confocal Raman spectra confirmed the DLC characteristics of the prepared films. Water contact angle increased from <30° on oxide-coated surfaces, to >110° on DLC-coated surfaces. The adhesion force of the DLC films was as low as 3.8nN measured by AFM, whereas the adhesion force of the oxide-coated surfaces was approximately 11.2nN. The polysilicon cantilever beam arrays have been used to determine the success of DLC coating for releasing microstructures. DLC films were prepared under the polysilicon cantilever beams with the sacrificial etching technology. The beam arrays were checked with scanning electron microscope. When the DLC films presented, the average longest detachment length was approximately 145μm. While the DLC films didn't present, the average critical detachment length was shorter than 80um. These results indicated the stiction of polysilicon cantilever beams was effectively restrained with DLC coatings.
机译：尽管现代微加工技术取得了创新性进展，但微结构的摩擦仍然是一个具有挑战性的问题。在本文中，建议使用类金刚石碳膜作为解决此问题的方法。微波电子回旋共振等离子体增强CVD设备已被用于制备DLC膜。共焦拉曼光谱证实了所制备膜的DLC特性。水接触角从氧化物涂层表面的<30°增加到DLC涂层表面的> 110°。通过AFM测得的DLC膜的粘附力低至3.8nN，而氧化物涂覆的表面的粘附力约为11.2nN。多晶硅悬臂梁阵列已被用于确定释放微结构的DLC涂层的成功。用牺牲蚀刻技术在多晶硅悬臂梁下制备DLC膜。用扫描电子显微镜检查束阵列。当呈现DLC膜时，平均最长分离长度约为145μm。尽管没有DLC膜，但平均临界分离长度却短于80um。这些结果表明，用DLC涂层可以有效地抑制多晶硅悬臂梁的变形。

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