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首页> 外文会议>HT2008;ASME summer heat transfer conference >Experimental and Theoretical Analysis of the Nanoscale Crater Generation with a Near Field Scanning Optical Tip
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Experimental and Theoretical Analysis of the Nanoscale Crater Generation with a Near Field Scanning Optical Tip

机译：近场扫描光学探针产生纳米尺度火山口的实验和理论分析

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Different nano-patteras have been generated with the same near field scanning optical microscope (NSOM) tips with multiple femtosecond laser pulses in different background gases. It is demonstrated that significant energy was transferred from the NSOM probe to a pure silicon surface for the generation of nano-protrusions and nano-craters, which shows the possibility of nano-fabrication with the present experimental configuration. In order to understand the heating effect of the target and the relationship between the generations of nano-craters, a corresponding theoretical analysis considering the wave format light propagation within a single tapering NSOM probe (first order approximation) and the subsequent light absorption in a target is established. This analysis show that electron temperature of around the nano-scale laser spot of target can be very high (>～ 10,000 K) during the laser pulse. However, both the photoexcited electron number density and lattice temperature are much less the threshold for a thermal and non-thermal evaporation. Therefore, supplementary mechanisms in additional to pure pulsed light absorption are required for generation of nano-craters on a target if a single tapering angle NSOM probe is applied.
机译：使用相同的近场扫描光学显微镜（NSOM）尖端已经产生了不同的纳米图案，这些尖端在不同的背景气体中具有多个飞秒激光脉冲。结果表明，大量能量从NSOM探针转移到纯硅表面，用于生成纳米突起和纳米坑，这表明采用本实验配置进行纳米加工的可能性。为了了解目标物的加热效果以及纳米坑的生成之间的关系，需要进行相应的理论分析，其中考虑了单个锥形NSOM探针内的波格式光传播（一阶近似）和目标物随后的光吸收。成立。分析表明，在激光脉冲过程中，目标纳米激光点周围的电子温度可能很高（>〜10,000 K）。但是，光激发电子数密度和晶格温度都远小于热蒸发和非热蒸发的阈值。因此，如果应用单个锥角NSOM探针，则除了纯脉冲光吸收外，还需要在目标上生成纳米坑的补充机制。

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