首页> 外文会议>Proceedings of the 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems >Preparation of Ni current collector and MoS2 cathode in three-dimensional Li ion microbattery based on silicon MCP
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Preparation of Ni current collector and MoS2 cathode in three-dimensional Li ion microbattery based on silicon MCP

机译:基于硅MCP的三维锂离子微型电池中Ni集电器和MoS 2 阴极的制备

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Three-dimensional Li ion microbatteries are known for their high surface area which leads to high current and capacity compared to traditional planar batteries. This paper describes economical approaches to prepare half 3D microbatteries based on silicon microchannel plates (MCP). The high aspect ratio silicon MCP is formed by electrochemical etching and a nickel layer is coated onto the silicon MCP as a current collector by electroless deposition. A molybdenum sulfide layer is electro-deposited onto the nickel coated silicon MCP as a cathode. The as-deposited molybdenum sulfide film is amorphous whereas the film annealed at a high temperature appears to be highly textured.
机译:三维锂离子微电池以其高表面积而著称,与传统的平面电池相比,它可带来高电流和高容量。本文介绍了基于硅微通道板(MCP)制备半3D微电池的经济方法。高深宽比的硅MCP通过电化学蚀刻形成,并且通过无电沉积将镍层涂覆在作为集电器的硅MCP上。硫化钼层被电沉积到镀镍的硅MCP上作为阴极。沉积的硫化钼膜是非晶态的,而在高温下退火的膜似乎具有很高的纹理。

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