Measurements to establish process ESD compatibility

机译：进行测量以建立过程ESD兼容性

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Currently, there are no standards for establishing equipment or process capability to handle devices of known ESD sensitivity. Correlating verification measurement tools with parameters of device testing is a first step. Measurements with a contacting high impedance voltmeter and ESD event detectors are compared to voltages and discharges of HBM and CDM testing.

机译：当前，没有建立用于处理已知ESD敏感度的设备的设备或处理能力的标准。将验证测量工具与设备测试参数相关联是第一步。将使用接触式高阻抗电压表和ESD事件检测器的测量结果与HBM和CDM测试的电压和放电进行比较。

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《2010 32nd Electrical Overstress/ Electrostatic Discharge Symposium》|2010年|1-8|共8页
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Steinman Arnold; Henry Leo G.; Hernandez Marcos;
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中图分类电器;
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Measurements to establish process ESD compatibility

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