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A new method and equipment to manufacture the composite powder materials by vacuum co-deposition of double sources

机译:一种双源真空共沉积制备复合粉体材料的新方法和设备

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In the process of manufacturing the composite materials, some of the chemical components are difficult to combine with each other. Aiming at this problem, a new method and supporting equipment of manufacturing the composite powder materials is reported which can make any two (or more) kinds of components mixing in nano-scale. This method is derived from the vacuum co-depositing technology by two (or more) vaporization sources for vacuum film coating, and some of the structures in vacuum film coil coating machine are used for reference. The principle, structure, process and characteristics of this method are introduced in detail. The models for depositing rate calculation are built respectively for both the electric resistance evaporation sources and the magnetron sputtering targets. The mixing component uniformity in the depositing powder material is analyzed by calculation.
机译:在制造复合材料的过程中,一些化学成分难以彼此结合。针对该问题,报道了一种新型的制造复合粉末材料的方法和辅助设备,其可以使任意两种(或更多种)组分以纳米级混合。该方法是由两个(或多个)汽化源用于真空镀膜的真空共沉积技术衍生而来,并以真空镀膜卷材涂布机中的某些结构作为参考。详细介绍了该方法的原理,结构,过程和特点。分别为电阻蒸发源和磁控溅射靶建立了沉积速率计算模型。通过计算分析沉积粉末材料中混合组分的均匀性。

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