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Usage Of Porous Indium Phosphide As Substrate For Indium Nitride Films

机译:多孔磷化铟作为氮化铟薄膜基材的用途

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In this paper the possibility of obtaining thin InN films on porous TnP substrates by radical-beam gettering epitaxy is considered. Porous InP was prepared by electrochemical etching. The formation of films of InN on the surface of porous InP was proved by Auger spectroscopy.
机译:在本文中,考虑了通过自由基束吸气外延在多孔TnP衬底上获得InN薄膜的可能性。通过电化学蚀刻制备多孔InP。通过俄歇光谱法证实了在多孔InP表面上形成InN膜。

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