Characterization of Refined Beams of Neutral Free Radicals Produced by Photo-Deionization of Negative Ion Beams

机译：负离子束光去离子产生的中性自由基精制束的表征

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摘要

Ion-current difference measurement by light intensity modulation (ICD ) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution.

机译：引入通过光强度调制（ICD）进行离子电流差测量作为表征表面反应选择装置的一种方便方法，该方法用于表征由负离子束的光去离子作用产生的动量控制的中性自由基的纯化束。加工。在这项研究中开发的ICD装置可以估算出光去离子的中性粒子的通量，从而显示出很高的精度，灵敏度和空间分辨率。

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《NSTI nanotechnology conference and expo;Nanotech conference expo;NSTI-Nanotech 2012;TechConnect world annual conference expo》|2012年|p.535-538|共4页
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Keiji Hayashi; Fumiya Tanaka; Taishi Sugiura; Tatsurou Matsuda;
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正文语种
中图分类特种结构材料;特种结构材料;
关键词
neutral free-radical beam; CW laser; negative ion; quantum device processing;

机译：中性自由基束连续激光;负离子量子器件处理;

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专利

1. In situ spatial-profile monitoring of beam flux of neutral free radicals produced by photo-deionization of negative ion beams [J] . Keiji Hayashi, Daisuke Tanaka, Harumi Araki, Applied Surface Science . 2009,第24期

机译：负离子束光去离子产生的中性自由基束通量的原位空间分布监测
2. Comparison of methods to measure the rate of neutral free radical production by photo-deionization of negative ion beams [J] . Keiji Hayashi, Hiroshi Konno, Takashi Oseki, Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2003,第May期

机译：负离子束光去离子法测量中性自由基产生速率的方法比较
3. Negative ion characterization in a helicon plasma source for fusion neutral beams by cavity ring-down spectroscopy and Langmuir probe laser photodetachment [J] . R. Agnello, S. Bechu, I. Furno, Nuclear fusion . 2020,第2期

机译：腔环衰荡光谱法和Langmuir探针激光光解法在聚变中性束螺线管等离子体源中表征负离子
4. Characterization of Refined Beams of Neutral Free Radicals Produced by Photo-Deionization of Negative Ion Beams [C] . Keiji Hayashi, Fumiya Tanaka, Taishi Sugiura, NSTI nanotechnology conference and expo . 2012

机译：负离子梁光去离子产生的中性自由基精制梁的特征
5. Generation and Characterization of Energetic Neutral Beams for Surface Modification [D] . Ayilaran, Adetokunbo. 2018

机译：高能量中性光束用于表面改性的生成和表征
6. Probing the Migration of Free Radicals in Solid and Liquid Media via Cr(VI) Reduction by High-Energy Electron Beam Irradiation [O] . Jie Han, Min Wang, Guilong Zhang, -1

机译：通过高能电子束辐照还原Cr（VI）来探测自由基在固体和液体介质中的迁移
7. Negative ion characterization in a helicon plasma source for fusion neutral beams by cavity ring-down spectroscopy and Langmuir probe laser photodetachment [O] . R. Agnello, S. Béchu, I. Furno, 2019

机译：腔循环光谱和Langmuir探头激光光电二升离熔体中性光束的肝脏等离子体源中的负离子特征
8. Production of Neutral Beams from Negative Ion Beam Systems in the USSR [R] . Wells, N. 1982

机译：从苏联的负离子束系统生产中性束

Characterization of Refined Beams of Neutral Free Radicals Produced by Photo-Deionization of Negative Ion Beams

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