Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr_(0.54)Ti_(0.46))O_3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. The images of the film surface after laser exposure were obtained by confocal optical microscopy.
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