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首页> 外文会议>IEEE International Conference on Industrial Engineering and Engineering Management >Deadlock avoidance policy for dual-armed multi-cluster tools with multi-flow
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Deadlock avoidance policy for dual-armed multi-cluster tools with multi-flow

机译：具有多流程的双臂多集群工具的避免死锁策略

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摘要

Cluster tools are widely used for semiconductor manufacturing. Scheduling of multi-cluster tools has been received much attention. A cluster tool consists of several processing modules, transfer module with single or dual-armed handling robot and loadlock modules. The multi-cluster tool consists of two or three cluster tools which are connected with buffer module. In this paper, we present a deadlock-free scheduling for dual-armed multi-cluster tools with multi-flow. We develop a deadlock avoidance policy for dual-armed multi-cluster tools with dual path. A Petri net model is analyzed to derive a deadlock avoidance policy. The deadlock-freeness is confirmed by analyzing siphon of Petri net model. The deadlock-free scheduling method is proposed. The proposed method is applied to the scheduling problem of three-cluster tools with dual path. The computational results show that no deadlock occurs with the proposed deadlock avoidance policy.
机译：集群工具广泛用于半导体制造。多集群工具的调度受到了很多关注。群集工具由多个处理模块，传输模块与单武装或双臂处理机器人和LoadLock模块组成。多簇工具由两个或三个与缓冲模块连接的群集工具组成。在本文中，我们对多流量的双武装多簇工具提供了一种致命的停止调度。我们为双武装多集群工具开发了避免避免策略，具有双路径。分析了培养净净模型以导出抵抗避税政策。通过分析培养的Petri净模型的虹吸来确认死锁-Freeness。提出了无止血调度方法。所提出的方法应用于双路径三簇工具的调度问题。计算结果表明，避免避免政策的建议的死锁没有发生死锁。

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