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Atmospheric electron X-ray spectrometer development

机译：大气电子X射线光谱仪开发

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The development of a portable surface elemental analysis tool based on the excitation of characteristic X-rays at ambient pressure with an electron beam is described. This instrument relies on the use of a thin electron transmissive membrane to isolate the vacuum of the electron source from the ambient atmosphere. The major advantages offered by this instrument include rapid spectrum acquisition, nondestructive evaluation of elemental composition, and high spatial resolution in comparison to similar portable instruments. The instrument proof-of-principle has been demonstrated by obtaining energy dispersive X-ray spectra from metal and mineral samples. SEM experiments have been carried out to determine beam spot size and quantitative analysis limits. Modeling has been performed to study performance limits and to understand the influence of membrane and atmosphere interactions on the focused electron beam.

机译：描述了基于通过电子束的环境压力在环境压力下激发的便携式表面元件分析工具的开发。该仪器依赖于使用薄的电子透射膜，将电子源的真空从环境大气中分离。该仪器提供的主要优点包括快速谱采集，对元素组成的无损评估，与类似便携式仪器相比，高空间分辨率。通过从金属和矿物样品获得能量分散X射线光谱来证明仪器原则上。已经进行了SEM实验以确定光束点尺寸和定量分析限制。已经进行了建模以研究性能限制，并了解膜和大气相互作用对聚焦电子束的影响。

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《IEEE Aerospace Conference》|2001年||共7页
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Feldman J.E.; Wilcox J.Z.; George T.; Institute of Electric and Electronic Engineer;
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7. Atmospheric electron X-ray spectrometer development [O] . J.E. Feldman, J.Z. Wilcox, T. George, -1

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8. Atmospheric electron-induced x-ray spectrometer development [R] . Wilcox, Jaroslava Z., Urgiles, Eduardo, Toda, Risaku, 2005

机译：大气电子诱导X射线光谱仪的开发

Atmospheric electron X-ray spectrometer development

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