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首页> 外文会议>IEEE Regional Symposium on Micro and Nano Electronics >Reproducibility and free spectral range (FSR) control of a high quality factor ??? 1D photonic crystal (PhC) extended cavity
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Reproducibility and free spectral range (FSR) control of a high quality factor ??? 1D photonic crystal (PhC) extended cavity

机译：高质量因子的重现性和自由光谱范围（FSR）控制一维光子晶体（PhC）扩展腔

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摘要

In this paper we report successful experimental demonstration of consistency in controlling the resonance quality factor (Q-factor) value in the range from 1000 to 80,000, together with good free spectral range (FSR) control in the range from 30 nm to 62 nm - for an extended cavity. We have also demonstrated good repeatability of high Q-factor values for 1D photonic crystal (PhC)/Photonic wire (PhW) extended cavities based on Silicon-on-Insulator (SOI) using different fabrication cycles. The cavities that are considered in this paper range from 2 μm to 8.25 μm in length. The Q-factors for each resonance obtained for particular extended cavities have been measured on different occasions, with 5% variation in the Q-value over an extended period of time.
机译：在本文中，我们报告了成功的实验证明，证明了将共振质量因子（Q-factor）值控制在1000至80,000范围内，以及将自由光谱范围（FSR）控制在30 nm至62 nm范围内的一致性-用于扩大型腔。我们还展示了使用不同的制造周期，基于绝缘体上硅（SOI）的一维光子晶体（PhC）/光子线（PhW）扩展腔的高Q值的良好重复性。本文中考虑的空腔长度范围为2μm至8.25μm。在不同情况下，已测量了针对特定延伸腔体获得的每个共振的Q因子，Q值在延长的时间段内有5％的变化。

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