Strong blue light emission from Eu-doped SiOC prepared by magnetron sputtering

机译：磁控溅射法制备的Eu掺杂SiOC发出的强烈蓝光

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The Eu-doped SiOC films were prepared by magnetron sputtering technique at a low temperature of 250 °C. The effects of the Eu_2O_3 deposited power and post-thermal annealing temperature on the PL characteristics of the Eu-doped SiOC films were investigated. It is found that the photoluminescence intensity could be enhanced by more than tenfold by increasing the Eu_2O_3 deposited power from 20W to 80W. Furthermore, very bright blue light emission can be clearly observed with the naked eye in a bright room for the Eu-doped SiOC films prepared at a Eu_2O_3 deposited power of 80 W. The improved PL intensity is attributed to the increasing number density of europium silicate clusters as a result of the increasing Eu_2O_3 deposited power as well as high annealing temperatures.

机译：通过磁控溅射技术在250°C的低温下制备Eu掺杂的SiOC薄膜。研究了Eu_2O_3的沉积功率和后热退火温度对掺Eu的SiOC薄膜PL特性的影响。发现通过将Eu_2O_3的沉积功率从20W增加到80W，可以将光致发光强度提高十倍以上。此外，对于在80 W Eu_2O_3沉积功率下制备的Eu掺杂的SiOC薄膜，可以在明亮的房间中用肉眼清楚地观察到非常明亮的蓝色发光。改进的PL强度归因于硅酸euro数量密度的增加由于Eu_2O_3沉积功率的增加以及退火温度的升高，金属团簇形成。

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《International Symposium on Photonics and Optoelectronics》|2015年|96560R.1-96560R.5|共5页
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Zhenxu Lin; Yanqing Guo; Xiang Wang; Chao Song; Jie Song; Yi Zhang; Rui Huang;
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Photoluminescence; Eu-doped SiOC; Magnetron sputtering;

机译：光致发光; -掺杂SiOC;磁控溅射;

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2. Photoluminescence behavior and thermal stability of Eu-doped SiAlON thin films prepared by RF magnetron co-sputtering of SiAlON and Eu_2O_3 targets [J] . Hou Shaoke, Liu Qian, Ni Jia, Functional materials letters . 2018,第4期

机译：射频磁控共溅射SiAlON和Eu_2O_3靶材制备的Eu掺杂SiAlON薄膜的光致发光行为和热稳定性
3. Correlation of structural properties with energy transfer of Eu-doped ZnO thin films prepared by sol-gel process and magnetron reactive sputtering [J] . Julien Petersen, Christelle Brimont, Mathieu Gallart, Journal of Applied Physics . 2010,第12期

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4. Strong blue light emission from Eu-doped SiOC prepared by magnetron sputtering [C] . Zhenxu Lin, Yanqing Guo, Xiang Wang, International Symposium on Photonics and Optoelectronics . 2015

机译：通过磁控溅射制备的欧盟掺杂的SIOC的强大蓝色发光
5. Texture evolution in metal nitride (aluminum nitride, titanium nitride, hafnium nitride) thin films prepared by off-normal incidence reactive magnetron sputtering . [D] . Deniz, Derya. 2008

机译：非垂直入射反应磁控溅射制备的金属氮化物（氮化铝，氮化钛，氮化ha）薄膜的织构演变。
6. Correlation of structural properties with energy transfer of Eu-doped ZnO thin films prepared by sol-gel process and magnetron reactive sputtering [O] . Julien Petersen, Christelle Brimont, Mathieu Gallart, -1

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7. Correlation of structural properties with energy transfer of Eu-doped ZnO thin films prepared by sol-gel process and magnetron reactive sputtering [O] . Petersen, Julien, Brimont, Christelle, Gallart, Mathieu, 2010

机译：溶胶-凝胶法和磁控反应溅射制备Eu掺杂ZnO薄膜的结构性能与能量转移的相关性

Strong blue light emission from Eu-doped SiOC prepared by magnetron sputtering

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