High Purity Aluminum Coatings Minimize Contamination in Semiconductor fabrication Tools

机译：高纯铝涂层最小化半导体制造工具中的污染

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1. Purer materials and coatings are needed for next generation semiconductor components 2. Electroplated Al yields better anodize properties than Al 6061 when anodized 3. Improved performance related to 3.1 Higher purity 3.2 Improved structure 4. Results consistent for traditional and advanced anodizations 5. Surface roughness is statiscally significant 6. Crazing and di-electric strength confounded.

机译：1.下一代半导体部件需要熔点材料和涂层2.当阳极氧化3的情况下，电镀A1产生比Al 6061更好的阳极氧化性特性。与3.1更高的纯度3.2改进的结构有关的改进的性能。结果为传统和高级氧化氧化均一致5.表面粗糙度是致命的显着6.裂缝和直视强度混淆。

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《National Association for Surface Finishing Annual International Technical Conference》|2015年||共12页
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Gus Vallejo;
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中图分类 TS913.7;
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1. Fabrication of high quality anodic aluminum oxide (AAO) on low purity aluminum-A comparative study with the AAO produced on high purity aluminum [J] . Marta Michalska-Domanska, Malgorzata Norek, Wojciech J. Stepniowski, Electrochimica Acta . 2013,第Null期

机译：低纯度铝上高品质阳极氧化铝（AAO）的制备-高纯度铝上AAO的比较研究
2. Application of in situ ellipsometry in the fabrication of thin-film optical coatings on semiconductors [J] . Marcel G. Boudreau, Steven G. Wallace, Ginutis Balcaitis Applied optics . 2000,第6期

机译：原位椭偏仪在半导体薄膜光学涂层制备中的应用
3. Fabrication of ceramic coatings from polysilazane/aluminum: Effect of aluminum content on chemical composition, microstructure, and mechanical properties [J] . Fengyan Xiao, Zongbo Zhang, Fan Zeng CERAMICS INTERNATIONAL . 2014,第1aPta1期

机译：用聚硅氮烷/铝制造陶瓷涂层：铝含量对化学成分，微观结构和机械性能的影响
4. High Purity Aluminum Coatings Minimize Contamination in Semiconductor fabrication Tools [C] . Gus Vallejo National Association for Surface Finishing Annual International Technical Conference . 2015

机译：高纯度铝涂层可最大程度减少半导体制造工具中的污染
5. An investigation of the adhesion behavior of aluminum on various PVD coatings applied to H13 tool steel to minimize or eliminate lubrication during high pressure die casting [D] . Wang, Bo. 2016

机译：研究铝在用于H13工具钢的各种PVD涂层上的附着行为，以最小化或消除高压压铸过程中的润滑
6. Fabrication of Sputtered Ce/La La/Ce Oxide Bilayers on AA6061 and AA7075 Aluminum Alloys for the Development of Corrosion Protective Coatings [O] . Silvia B. Brachetti-Sibaja, Miguel A. Domínguez-Crespo, Aidé M. Torres-Huerta, 2018

机译：在AA6061和AA7075铝合金上制备溅射的Ce / LaLa / Ce氧化物双层以开发防腐蚀涂层
7. Elimination of internal contamination on semiconductor devices (protective coatings). Final report [O] . T. Castillo 1994

机译：消除半导体器件（保护涂层）的内部污染。总结报告
8. Elimination of internal contamination on semiconductor devices (protective coatings). Final report [R] . Castillo, T. 1994

机译：消除半导体器件上的内部污染（保护涂层）。总结报告

High Purity Aluminum Coatings Minimize Contamination in Semiconductor fabrication Tools

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